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Design and characterization of CMOS compatible mircromirror arrays in SiGe MEMS technology

dc.contributor.authorBeernaert, Roel
dc.date.accessioned2021-10-19T12:32:22Z
dc.date.available2021-10-19T12:32:22Z
dc.date.issued2011-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18538
dc.sourceIIOimport
dc.titleDesign and characterization of CMOS compatible mircromirror arrays in SiGe MEMS technology
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Smet, Herbert
imec.availabilityPublished - imec


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