Cesium retention during sputtering with low energy Cs+ and oxygen flooding
dc.contributor.author | Berghmans, Bart | |
dc.contributor.author | Rip, Jens | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-19T12:33:42Z | |
dc.date.available | 2021-10-19T12:33:42Z | |
dc.date.issued | 2011-01 | |
dc.identifier.issn | 0142-2421 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18555 | |
dc.source | IIOimport | |
dc.title | Cesium retention during sputtering with low energy Cs+ and oxygen flooding | |
dc.type | Journal article | |
dc.contributor.imecauthor | Rip, Jens | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 225 | |
dc.source.endpage | 227 | |
dc.source.journal | Surface and Interface Analysis | |
dc.source.issue | 1_2 | |
dc.source.volume | 43 | |
imec.availability | Published - open access |