Fundamental study of photomodulated optical reflectance towards non-destructive carrier profiling in silicon
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.date.accessioned | 2021-10-19T12:37:14Z | |
| dc.date.available | 2021-10-19T12:37:14Z | |
| dc.date.issued | 2011-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18596 | |
| dc.source | IIOimport | |
| dc.title | Fundamental study of photomodulated optical reflectance towards non-destructive carrier profiling in silicon | |
| dc.type | PHD thesis | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| imec.availability | Published - open access |