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Novel technologies for elastic microsystems: development, characterization and applications

dc.contributor.authorBossuyt, Frederick
dc.date.accessioned2021-10-19T12:38:28Z
dc.date.available2021-10-19T12:38:28Z
dc.date.issued2011-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18608
dc.sourceIIOimport
dc.titleNovel technologies for elastic microsystems: development, characterization and applications
dc.typePHD thesis
dc.contributor.imecauthorBossuyt, Frederick
dc.contributor.orcidimecBossuyt, Frederick::0000-0003-3350-9295
dc.source.peerreviewno
dc.contributor.thesisadvisorVanfleteren, Jan
imec.availabilityPublished - imec


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