dc.contributor.author | Breuil, Laurent | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Cacciato, Antonio | |
dc.contributor.author | Date, Lucien | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.contributor.author | Tang, Baojun | |
dc.contributor.author | Arreghini, Antonio | |
dc.contributor.author | Debusschere, Ingrid | |
dc.contributor.author | Van Houdt, Jan | |
dc.date.accessioned | 2021-10-19T12:40:16Z | |
dc.date.available | 2021-10-19T12:40:16Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18624 | |
dc.source | IIOimport | |
dc.title | Optimization of gate stack parameters towards 3D-SONOS application | |
dc.type | Journal article | |
dc.contributor.imecauthor | Breuil, Laurent | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Date, Lucien | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.imecauthor | Arreghini, Antonio | |
dc.contributor.imecauthor | Debusschere, Ingrid | |
dc.contributor.imecauthor | Van Houdt, Jan | |
dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
dc.contributor.orcidimec | Van Houdt, Jan::0000-0003-1381-6925 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1164 | |
dc.source.endpage | 1167 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 7 | |
dc.source.volume | 88 | |
imec.availability | Published - imec | |
imec.internalnotes | INFOS 2011 paper | |