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Impact of firing on surface passivation of p-Si by SiO2/Al and SiO2/SiNx/Al stacks

dc.contributor.authorChen, Jiahe
dc.contributor.authorCornagliotti, Emanuele
dc.contributor.authorLoozen, Xavier
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVanhellemont, J.
dc.contributor.authorLauwaert, J.
dc.contributor.authorVrielinck, H.
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-19T12:44:33Z
dc.date.available2021-10-19T12:44:33Z
dc.date.issued2011
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18659
dc.sourceIIOimport
dc.titleImpact of firing on surface passivation of p-Si by SiO2/Al and SiO2/SiNx/Al stacks
dc.typeJournal article
dc.contributor.imecauthorCornagliotti, Emanuele
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage126101
dc.source.journalJournal of Applied Physics
dc.source.issue12
dc.source.volume110
imec.availabilityPublished - open access


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