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Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

dc.contributor.authorDe Volder, Michael
dc.contributor.authorPark, S.J.
dc.contributor.authorTawfik, S.H.
dc.contributor.authorVidaud, D.O.
dc.contributor.authorHart, A.J.
dc.date.accessioned2021-10-19T13:07:42Z
dc.date.available2021-10-19T13:07:42Z
dc.date.issued2011
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18800
dc.sourceIIOimport
dc.titleFabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage45033
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue4
dc.source.volume21
imec.availabilityPublished - open access


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