dc.contributor.author | De Vos, Joeri | |
dc.contributor.author | De Munck, Koen | |
dc.contributor.author | Minoglou, Kiki | |
dc.contributor.author | Ramachandra Rao, Padmakumar | |
dc.contributor.author | Erismis, Mehmet Akif | |
dc.contributor.author | De Moor, Piet | |
dc.contributor.author | Sabuncuoglu Tezcan, Deniz | |
dc.date.accessioned | 2021-10-19T13:09:07Z | |
dc.date.available | 2021-10-19T13:09:07Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 0960-1317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18807 | |
dc.source | IIOimport | |
dc.title | On the processing aspects of high performance hybrid backside | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Vos, Joeri | |
dc.contributor.imecauthor | De Munck, Koen | |
dc.contributor.imecauthor | De Moor, Piet | |
dc.contributor.imecauthor | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.orcidimec | De Vos, Joeri::0000-0002-9332-9336 | |
dc.contributor.orcidimec | Sabuncuoglu Tezcan, Deniz::0000-0002-9237-7862 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 74006 | |
dc.source.journal | Journal of Micromechanics and Microengineering | |
dc.source.issue | 7 | |
dc.source.volume | 21 | |
dc.identifier.url | http://stacks.iop.org/0960-1317/21/074006 | |
imec.availability | Published - imec | |