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Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition

dc.contributor.authorDewulf, Daan
dc.contributor.authorPeys, Nick
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorRampelberg, Geert
dc.contributor.authorDetavernier, G.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.date.accessioned2021-10-19T13:16:24Z
dc.date.available2021-10-19T13:16:24Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18842
dc.sourceIIOimport
dc.titleInterfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition
dc.typeJournal article
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1338
dc.source.endpage1341
dc.source.journalMicroelectronic Engineering
dc.source.issue7
dc.source.volume88
imec.availabilityPublished - open access


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