dc.contributor.author | Farrel, Leo | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Van Besien, Els | |
dc.contributor.author | Ciofi, Ivan | |
dc.contributor.author | Borrello, Gianpaolo | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Mardani, Shabnam | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-19T13:28:51Z | |
dc.date.available | 2021-10-19T13:28:51Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 1533-4880 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18896 | |
dc.source | IIOimport | |
dc.title | Influence of varying porogen loads and different UV cures on low-k film characteristics | |
dc.type | Journal article | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Van Besien, Els | |
dc.contributor.imecauthor | Ciofi, Ivan | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | Van Besien, Els::0000-0002-5174-2229 | |
dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 8363 | |
dc.source.endpage | 8367 | |
dc.source.journal | Journal of Nanoscience and Nanotechnology | |
dc.source.issue | 9 | |
dc.source.volume | 11 | |
imec.availability | Published - imec | |
imec.internalnotes | Paper from EuroCVD 18 | |