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Influence of varying porogen loads and different UV cures on low-k film characteristics

dc.contributor.authorFarrel, Leo
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVan Besien, Els
dc.contributor.authorCiofi, Ivan
dc.contributor.authorBorrello, Gianpaolo
dc.contributor.authorVanstreels, Kris
dc.contributor.authorMardani, Shabnam
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-19T13:28:51Z
dc.date.available2021-10-19T13:28:51Z
dc.date.issued2011
dc.identifier.issn1533-4880
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18896
dc.sourceIIOimport
dc.titleInfluence of varying porogen loads and different UV cures on low-k film characteristics
dc.typeJournal article
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewyes
dc.source.beginpage8363
dc.source.endpage8367
dc.source.journalJournal of Nanoscience and Nanotechnology
dc.source.issue9
dc.source.volume11
imec.availabilityPublished - imec
imec.internalnotesPaper from EuroCVD 18


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