Show simple item record

Impact of halo implant on the hot carrier reliability of germanium pMOSFETs

dc.contributor.authorFranco, Jacopo
dc.contributor.authorEneman, Geert
dc.contributor.authorKaczer, Ben
dc.contributor.authorMitard, Jerome
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-19T13:35:47Z
dc.date.available2021-10-19T13:35:47Z
dc.date.issued2011
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18924
dc.sourceIIOimport
dc.titleImpact of halo implant on the hot carrier reliability of germanium pMOSFETs
dc.typeJournal article
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage01A804
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume29
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
22132.pdf
Size:
359.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record