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Diamond tips for automated electrical probing inside a scanning electron microscopy system

dc.contributor.authorHantschel, Thomas
dc.contributor.authorArstila, Kai
dc.contributor.authorOlantera, Lauri
dc.contributor.authorSchulze, Andreas
dc.contributor.authorWerner, Thilo
dc.contributor.authorEyben, Pierre
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T14:07:37Z
dc.date.available2021-10-19T14:07:37Z
dc.date.issued2011
dc.identifier.issn0925-9635
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19037
dc.sourceIIOimport
dc.titleDiamond tips for automated electrical probing inside a scanning electron microscopy system
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.beginpage655
dc.source.endpage659
dc.source.journalDiamond and Related Materials
dc.source.issue5_6
dc.source.volume20
imec.availabilityPublished - imec


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