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Systematic study of shallow junction formation on germanium substrates

dc.contributor.authorHellings, Geert
dc.contributor.authorRosseel, Erik
dc.contributor.authorClarysse, Trudo
dc.contributor.authorPetersen, Dirch Hjorth
dc.contributor.authorHansen, Ole
dc.contributor.authorNielsen, Peter Folmet
dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T14:14:16Z
dc.date.available2021-10-19T14:14:16Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19059
dc.sourceIIOimport
dc.titleSystematic study of shallow junction formation on germanium substrates
dc.typeJournal article
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.source.peerreviewyes
dc.source.beginpage347
dc.source.endpage350
dc.source.journalMicroelectronic Engineering
dc.source.issue4
dc.source.volume88
imec.availabilityPublished - imec


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