dc.contributor.author | Kochupurackal, Jinesh | |
dc.contributor.author | Dam, Van Anh | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | de Nooijer, Christine | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Brongersma, Sywert | |
dc.contributor.author | Crego-Calama, M. | |
dc.date.accessioned | 2021-10-19T14:54:28Z | |
dc.date.available | 2021-10-19T14:54:28Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 0925-4005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19189 | |
dc.source | IIOimport | |
dc.title | Room-temperature CO2 sensing using metal-insulator-semiconductor capacitors comprising atomic-layer-deposited La2O3 thin films | |
dc.type | Journal article | |
dc.contributor.imecauthor | Dam, Van Anh | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | de Nooijer, Christine | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Brongersma, Sywert | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 276 | |
dc.source.endpage | 282 | |
dc.source.journal | Sensors and Actuators B: Chemical | |
dc.source.issue | 1 | |
dc.source.volume | 156 | |
imec.availability | Published - open access | |