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Mushroom microlenses: optimized microlenses by reflow of multiple layers of photoresist

dc.contributor.authorHeremans, Paul
dc.contributor.authorGenoe, Jan
dc.contributor.authorKuijk, Maarten
dc.contributor.authorVounckx, Roger
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-09-30T08:25:23Z
dc.date.available2021-09-30T08:25:23Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1927
dc.sourceIIOimport
dc.titleMushroom microlenses: optimized microlenses by reflow of multiple layers of photoresist
dc.typeJournal article
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorVounckx, Roger
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1367
dc.source.endpage1369
dc.source.journalIEEE Photonics Technology Letters
dc.source.issue10
dc.source.volume9
imec.availabilityPublished - open access


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