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Angular spectroscopic analysis: an optical characterization technique for laterally oxidized AlGaAs layers

dc.contributor.authorHeremans, Paul
dc.contributor.authorKuijk, Maarten
dc.contributor.authorWindisch, Reiner
dc.contributor.authorVanderhaegen, Johan
dc.contributor.authorDe Neve, Hans
dc.contributor.authorVounckx, Roger
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-09-30T08:25:36Z
dc.date.available2021-09-30T08:25:36Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1928
dc.sourceIIOimport
dc.titleAngular spectroscopic analysis: an optical characterization technique for laterally oxidized AlGaAs layers
dc.typeJournal article
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorVounckx, Roger
dc.contributor.imecauthorBorghs, Gustaaf
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage5265
dc.source.endpage5267
dc.source.journalJournal of Applied Physics
dc.source.volume82
imec.availabilityPublished - open access


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