Show simple item record

Hyperthermal oxygen interacting with silicon surfaces : adsorption, implantation, and damage creation

dc.contributor.authorNeyts, Erik
dc.contributor.authorKhalilov, Umedjon
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorvan Duin, Adri
dc.date.accessioned2021-10-19T16:40:13Z
dc.date.available2021-10-19T16:40:13Z
dc.date.issued2011
dc.identifier.issn1932-7447
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19477
dc.sourceIIOimport
dc.titleHyperthermal oxygen interacting with silicon surfaces : adsorption, implantation, and damage creation
dc.typeJournal article
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.source.peerreviewyes
dc.source.beginpage48418
dc.source.endpage4823
dc.source.journalJournal of Physical Chemistry C
dc.source.issue15
dc.source.volume115
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record