Show simple item record

Ultra Clean or "Just Clean Enough" technology

dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T12:42:07Z
dc.date.available2021-09-29T12:42:07Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/194
dc.sourceIIOimport
dc.titleUltra Clean or "Just Clean Enough" technology
dc.typeJournal article
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpage127
dc.source.endpage128
dc.source.journalSolid State Technology
dc.source.issue12
dc.source.volume37
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record