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Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorLi, X. N.
dc.contributor.authorZhang, Zheng
dc.contributor.authorDong, C.
dc.contributor.authorGong, Z. X.
dc.contributor.authorMa, T. C.
dc.date.accessioned2021-09-30T08:31:07Z
dc.date.available2021-09-30T08:31:07Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1956
dc.sourceIIOimport
dc.titleMicrostructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage116
dc.source.endpage123
dc.source.journalApplied Surface Science
dc.source.issue2
dc.source.volume115
imec.availabilityPublished - open access


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