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A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorSwerts, Johan
dc.contributor.authorFavia, Paola
dc.contributor.authorDelabie, Annelies
dc.contributor.authorBender, Hugo
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorTielens, Hilde
dc.contributor.authorBrijs, Bert
dc.contributor.authorKaczer, Ben
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKim, Min-Soo
dc.contributor.authorAltimime, Laith
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-19T17:31:52Z
dc.date.available2021-10-19T17:31:52Z
dc.date.issued2011
dc.identifier.issn0031-8965
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19602
dc.sourceIIOimport
dc.titleA comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.source.peerreviewyes
dc.source.beginpage1920
dc.source.endpage1924
dc.source.journalPhysica Status Solidi A
dc.source.issue8
dc.source.volume208
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201026710/abstract
imec.availabilityPublished - imec


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