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Electrostatic discharge (ESD) in microelectromechanical systems (MEMS): sensitivity and protection

dc.contributor.authorSangameswaran, Sandeep
dc.date.accessioned2021-10-19T18:24:02Z
dc.date.available2021-10-19T18:24:02Z
dc.date.issued2011-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19724
dc.sourceIIOimport
dc.titleElectrostatic discharge (ESD) in microelectromechanical systems (MEMS): sensitivity and protection
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Wolf, Ingrid
dc.contributor.thesisadvisorGroeseneken, Guido
imec.availabilityPublished - open access


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