CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording
dc.contributor.author | Seidl, Karsten | |
dc.contributor.author | Herwik, Stanislav | |
dc.contributor.author | Torfs, Tom | |
dc.contributor.author | Pereira Neves, Hercules | |
dc.contributor.author | Paul, Oliver | |
dc.contributor.author | Ruther, Patrick | |
dc.date.accessioned | 2021-10-19T18:37:39Z | |
dc.date.available | 2021-10-19T18:37:39Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 1057-7157 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19755 | |
dc.source | IIOimport | |
dc.title | CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording | |
dc.type | Journal article | |
dc.contributor.imecauthor | Torfs, Tom | |
dc.contributor.orcidimec | Torfs, Tom::0000-0002-1302-3346 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1439 | |
dc.source.endpage | 1448 | |
dc.source.journal | Journal of Microelectromechanical Systems | |
dc.source.issue | 6 | |
dc.source.volume | 20 | |
imec.availability | Published - open access |