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Wafer-scale fabrication technology for silicon photonic integrated circuits

dc.contributor.authorSelvaraja, Shankar
dc.date.accessioned2021-10-19T18:39:27Z
dc.date.available2021-10-19T18:39:27Z
dc.date.issued2011-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19759
dc.sourceIIOimport
dc.titleWafer-scale fabrication technology for silicon photonic integrated circuits
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorBogaerts, Wim
dc.contributor.thesisadvisorVan Thourhout, Dries
imec.availabilityPublished - imec
imec.internalnotesISBN 978-90-8578-410-4


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