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Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement

dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorBogaerts, Wim
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-19T18:39:52Z
dc.date.available2021-10-19T18:39:52Z
dc.date.issued2011-01
dc.identifier.issn0030-4018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19760
dc.sourceIIOimport
dc.titleLoss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2141
dc.source.endpage2144
dc.source.journalOptics Communications
dc.source.issue8
dc.source.volume284
imec.availabilityPublished - open access


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