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Germanium surface conditioning and passivation

dc.contributor.authorSioncke, Sonja
dc.contributor.authorChabal, Yves J.
dc.contributor.authorFrank, Martin M.
dc.date.accessioned2021-10-19T18:58:43Z
dc.date.available2021-10-19T18:58:43Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19800
dc.sourceIIOimport
dc.titleGermanium surface conditioning and passivation
dc.typeBook chapter
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage429
dc.source.bookHandbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications
dc.source.endpage472
imec.availabilityPublished - open access
imec.internalnotesChapter 12


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