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Rare-earth aluminates as a charge trapping materials for NAND Flash memories: Integration and electrical evaluation

dc.contributor.authorSuhane, Amit
dc.contributor.authorCacciato, Antonio
dc.contributor.authorRichard, Olivier
dc.contributor.authorArreghini, Antonio
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorSwerts, Johan
dc.contributor.authorRothschild, Aude
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorBreuil, Laurent
dc.contributor.authorBender, Hugo
dc.contributor.authorJurczak, Gosia
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorKittl, Jorge
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-19T19:21:24Z
dc.date.available2021-10-19T19:21:24Z
dc.date.issued2011
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19848
dc.sourceIIOimport
dc.titleRare-earth aluminates as a charge trapping materials for NAND Flash memories: Integration and electrical evaluation
dc.typeJournal article
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.beginpage177
dc.source.endpage183
dc.source.journalSolid-State Electronics
dc.source.volume65-66
imec.availabilityPublished - imec
imec.internalnotesSelected Papers from the ESSDERC 2010 Conference


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