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Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping

dc.contributor.authorSwerts, Johan
dc.contributor.authorGielis, Sven
dc.contributor.authorVereecke, Guy
dc.contributor.authorHardy, An
dc.contributor.authorDewulf, Daan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-19T19:24:51Z
dc.date.available2021-10-19T19:24:51Z
dc.date.issued2011
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19855
dc.sourceIIOimport
dc.titleStabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping
dc.typeJournal article
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage102904
dc.source.journalApplied Physics Letters
dc.source.issue10
dc.source.volume98
imec.availabilityPublished - open access


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