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Effects of TOP electrode annealing on the PZT thin films

dc.contributor.authorLee, Eun Gu
dc.contributor.authorWouters, Dirk
dc.contributor.authorWillems, Geert
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-30T09:17:02Z
dc.date.available2021-09-30T09:17:02Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1985
dc.sourceIIOimport
dc.titleEffects of TOP electrode annealing on the PZT thin films
dc.typeJournal article
dc.contributor.imecauthorWillems, Geert
dc.contributor.orcidimecWillems, Geert::0000-0002-9137-618X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage165
dc.source.endpage174
dc.source.journalIntegrated Ferroelectrics
dc.source.volume16
imec.availabilityPublished - open access


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