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Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth

dc.contributor.authorTaylor, A.
dc.contributor.authorFendrych, F.
dc.contributor.authorFekete, L.
dc.contributor.authorVlcek, J.
dc.contributor.authorRezacova, V.
dc.contributor.authorPetrak, V.
dc.contributor.authorKrucy, J.
dc.contributor.authorNesladek, Milos
dc.contributor.authorLiehr, M.
dc.date.accessioned2021-10-19T19:34:08Z
dc.date.available2021-10-19T19:34:08Z
dc.date.issued2011
dc.identifier.issn0925-9635
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19875
dc.sourceIIOimport
dc.titleNovel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth
dc.typeJournal article
dc.contributor.imecauthorNesladek, Milos
dc.source.peerreviewyes
dc.source.beginpage613
dc.source.endpage615
dc.source.journalDiamond and Related Materials
dc.source.issue4
dc.source.volume20
imec.availabilityPublished - imec


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