HF etching mechanisms of heavily doped Si
| dc.contributor.author | Valckx, Nick | |
| dc.date.accessioned | 2021-10-19T20:03:34Z | |
| dc.date.available | 2021-10-19T20:03:34Z | |
| dc.date.issued | 2011-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19936 | |
| dc.source | IIOimport | |
| dc.title | HF etching mechanisms of heavily doped Si | |
| dc.type | PHD thesis | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.contributor.thesisadvisor | De Gendt, Stefan | |
| dc.contributor.thesisadvisor | Vinckier, Chris | |
| imec.availability | Published - open access |