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Optical retroreflective marker fabricated on silicon-on-insulator

dc.contributor.authorVan Acoleyen, Karel
dc.contributor.authorO'Brien, D.C.
dc.contributor.authorPayne, F.
dc.contributor.authorBogaerts, Wim
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-19T20:06:49Z
dc.date.available2021-10-19T20:06:49Z
dc.date.issued2011-10
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19943
dc.sourceIIOimport
dc.titleOptical retroreflective marker fabricated on silicon-on-insulator
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage789
dc.source.endpage798
dc.source.journalIEEE Photonics Journal
dc.source.issue5
dc.source.volume3
imec.availabilityPublished - open access


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