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In-situ characterization of mechanical properties of MEMS structural layers using different test approaches, with application to thick poly-SiGe

dc.contributor.authorVan Barel, Greg
dc.date.accessioned2021-10-19T20:08:09Z
dc.date.available2021-10-19T20:08:09Z
dc.date.issued2011-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19946
dc.sourceIIOimport
dc.titleIn-situ characterization of mechanical properties of MEMS structural layers using different test approaches, with application to thick poly-SiGe
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Ceuninck, Ward
dc.contributor.thesisadvisorWitvrouw, Ann
imec.availabilityPublished - open access


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