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Zero-energy SIMS. Towards quantitative depth profiles with high depth and high spatial resolution

dc.contributor.authorVanhove, Nico
dc.date.accessioned2021-10-19T20:50:21Z
dc.date.available2021-10-19T20:50:21Z
dc.date.issued2011-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20036
dc.sourceIIOimport
dc.titleZero-energy SIMS. Towards quantitative depth profiles with high depth and high spatial resolution
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.contributor.thesisadvisorLievens, P.
imec.availabilityPublished - open access


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