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Effect of the composition on the bandgap width of high-k MexTiyOz (Me=Hf,Ta, Sr)

dc.contributor.authorWang, Wan-Chih
dc.contributor.authorBadylevich, V.
dc.contributor.authorAfanas'ev, V.V.
dc.contributor.authorStesmans, Andre
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorMenou, Nicolas
dc.contributor.authorKittl, Jorge
dc.contributor.authorLukosius, M.
dc.contributor.authorBaristiran Kaynak, C.
dc.contributor.authorWenger, Ch.
dc.date.accessioned2021-10-19T21:40:23Z
dc.date.available2021-10-19T21:40:23Z
dc.date.issued2011
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20132
dc.sourceIIOimport
dc.titleEffect of the composition on the bandgap width of high-k MexTiyOz (Me=Hf,Ta, Sr)
dc.typeJournal article
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorTomida, Kazuyuki
dc.source.peerreviewyes
dc.source.beginpage5730
dc.source.endpage5733
dc.source.journalThin Solid Films
dc.source.issue17
dc.source.volume519
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0040609011005050
imec.availabilityPublished - imec


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