| dc.contributor.author | Zhang, Wenqi | |
| dc.contributor.author | Limaye, Paresh | |
| dc.contributor.author | La Manna, Antonio | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.author | Soussan, Philippe | |
| dc.date.accessioned | 2021-10-19T22:21:13Z | |
| dc.date.available | 2021-10-19T22:21:13Z | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 1555-9270 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20211 | |
| dc.source | IIOimport | |
| dc.title | 3D | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | La Manna, Antonio | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.imecauthor | Soussan, Philippe | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.contributor.orcidimec | Soussan, Philippe::0000-0002-1347-6978 | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 11 | |
| dc.source.endpage | 13 | |
| dc.source.journal | Semiconductor Manufacturing China | |
| dc.source.issue | 4 | |
| dc.source.volume | 12 | |
| imec.availability | Published - open access | |
