Show simple item record

Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers

dc.contributor.authorZhao, Larry
dc.contributor.authorLofrano, Melina
dc.contributor.authorCroes, Kristof
dc.contributor.authorVan Besien, Els
dc.contributor.authorTokei, Zsolt
dc.contributor.authorWilson, Chris
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorBeyer, Gerald
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-19T22:26:32Z
dc.date.available2021-10-19T22:26:32Z
dc.date.issued2011
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20221
dc.sourceIIOimport
dc.titleEvaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
dc.typeJournal article
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.source.peerreviewyes
dc.source.beginpage662
dc.source.endpage666
dc.source.journalThin Solid Films
dc.source.issue1
dc.source.volume520
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record