Nanoporous dielectric materials for advanced micro- and nanoelectronics
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-20T10:04:15Z | |
| dc.date.available | 2021-10-20T10:04:15Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20336 | |
| dc.source | IIOimport | |
| dc.title | Nanoporous dielectric materials for advanced micro- and nanoelectronics | |
| dc.type | Book chapter | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 3 | |
| dc.source.book | Nanodevices and Nanomaterials for Ecological Security. | |
| dc.source.endpage | 18 | |
| imec.availability | Published - open access | |
| imec.internalnotes | Nato Science for Peace Series B - Physics and Biophysics |