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Optimization of post-texturization cleans for heterojunction solar cells

dc.contributor.authorBearda, Twan
dc.contributor.authorYoshikawa, Kunta
dc.contributor.authorVan Assche, Elisabeth
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorGordon, Ivan
dc.contributor.authorYamamoto, Kenji
dc.contributor.authorBaert, Kris
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-20T10:04:49Z
dc.date.available2021-10-20T10:04:49Z
dc.date.issued2012
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20345
dc.sourceIIOimport
dc.titleOptimization of post-texturization cleans for heterojunction solar cells
dc.typeJournal article
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorYamamoto, Kenji
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage341
dc.source.endpage344
dc.source.journalSolid State Phenomena
dc.source.volume187
imec.availabilityPublished - imec
imec.internalnotes10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS


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