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Study of ultrasound-assisted radio frequency plasma discharges in n-Dodecane

dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorDe Schepper, Peter
dc.contributor.authorNikiforov, Anton
dc.contributor.authorBrems, Steven
dc.contributor.authorShamiryan, Denis
dc.contributor.authorBoullart, Werner
dc.contributor.authorLeys, Christophe
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-20T10:11:05Z
dc.date.available2021-10-20T10:11:05Z
dc.date.issued2012
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20412
dc.sourceIIOimport
dc.titleStudy of ultrasound-assisted radio frequency plasma discharges in n-Dodecane
dc.typeJournal article
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorDe Schepper, Peter
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage435201
dc.source.journalJournal of Physics D: Applied Physics
dc.source.issue43
dc.source.volume45
imec.availabilityPublished - open access


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