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Study of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 μm) solar substrates

dc.contributor.authorChan, BT
dc.contributor.editorKunnen, Eddy
dc.contributor.editorUhlig, Matthias
dc.contributor.editorde Marneffe, Jean-Francois
dc.contributor.editorXu, Kaidong
dc.contributor.editorBoullart, Werner
dc.contributor.editorRau, Bernd
dc.contributor.editorPoortmans, Jef
dc.date.accessioned2021-10-20T10:13:39Z
dc.date.available2021-10-20T10:13:39Z
dc.date.issued2012
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20433
dc.sourceIIOimport
dc.titleStudy of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 μm) solar substrates
dc.typeJournal article
dc.contributor.imecauthorChan, BT
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage10NA01
dc.source.journalJapanese Journal of Applied Physics
dc.source.issue10_2
dc.source.volume51
imec.availabilityPublished - imec


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