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Formation of V-grooves on the (Al,Ga)N surface as means of tensile stress relaxation

dc.contributor.authorCheng, Kai
dc.contributor.authorLeys, Maarten
dc.contributor.authorDegroote, Stefan
dc.contributor.authorBender, Hugo
dc.contributor.authorFavia, Paola
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorGermain, Marianne
dc.date.accessioned2021-10-20T10:15:56Z
dc.date.available2021-10-20T10:15:56Z
dc.date.issued2012
dc.identifier.issn0022-0248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20449
dc.sourceIIOimport
dc.titleFormation of V-grooves on the (Al,Ga)N surface as means of tensile stress relaxation
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.source.peerreviewyes
dc.source.beginpage88
dc.source.endpage94
dc.source.journalJournal of Crystal Growth
dc.source.volume353
imec.availabilityPublished - imec


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