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High-damping carbon nanotube hinged micromirrors

dc.contributor.authorDe Volder, Michael
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorReynaerts, Dominiek
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorSang-Gook, Kim
dc.date.accessioned2021-10-20T10:34:59Z
dc.date.available2021-10-20T10:34:59Z
dc.date.issued2012
dc.identifier.issn1613-6810
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20563
dc.sourceIIOimport
dc.titleHigh-damping carbon nanotube hinged micromirrors
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewyes
dc.source.beginpage2006
dc.source.endpage2010
dc.source.journalSmall
dc.source.issue3
dc.source.volume8
imec.availabilityPublished - imec


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