Si nanoripples: A growth dynamical study
dc.contributor.author | Dhillon, Prabhjeet Kaur | |
dc.contributor.author | Sarkar, Subhendu | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-20T10:43:38Z | |
dc.date.available | 2021-10-20T10:43:38Z | |
dc.date.issued | 2012 | |
dc.identifier.issn | 0169-4332 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20606 | |
dc.source | IIOimport | |
dc.title | Si nanoripples: A growth dynamical study | |
dc.type | Journal article | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 9579 | |
dc.source.endpage | 9583 | |
dc.source.journal | Applied Surface Science | |
dc.source.issue | 24 | |
dc.source.volume | 258 | |
imec.availability | Published - imec |
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