Fabrication of poly-SiGe MEMS structures with a substrate budget of 250°C
| dc.contributor.author | El Rifai, Joumana | |
| dc.date.accessioned | 2021-10-20T10:51:46Z | |
| dc.date.available | 2021-10-20T10:51:46Z | |
| dc.date.issued | 2012-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20642 | |
| dc.source | IIOimport | |
| dc.title | Fabrication of poly-SiGe MEMS structures with a substrate budget of 250°C | |
| dc.type | PHD thesis | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.contributor.thesisadvisor | Van Hoof, Chris | |
| dc.contributor.thesisadvisor | Puers, Bob | |
| imec.availability | Published - imec |