Show simple item record

Time-dependent dielectric breakdown on subnanometer EOT nMOS FinFETs

dc.contributor.authorFeijoo, Pedro C.
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorSan Andrés, Enrique
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-20T10:59:29Z
dc.date.available2021-10-20T10:59:29Z
dc.date.issued2012
dc.identifier.issn1530-4388
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20674
dc.sourceIIOimport
dc.titleTime-dependent dielectric breakdown on subnanometer EOT nMOS FinFETs
dc.typeJournal article
dc.contributor.imecauthorGroeseneken, Guido
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage166
dc.source.endpage170
dc.source.journalIEEE Transactions on Device and Materials Reliability
dc.source.issue1
dc.source.volume12
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
25517.pdf
Size:
608.6Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record