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Poly-SiGe for MEMS-above-CMOS integration: study of piezoresistivity with application to pressure sensors

dc.contributor.authorGonzalez, Pilar
dc.date.accessioned2021-10-20T11:15:41Z
dc.date.available2021-10-20T11:15:41Z
dc.date.issued2012-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20736
dc.sourceIIOimport
dc.titlePoly-SiGe for MEMS-above-CMOS integration: study of piezoresistivity with application to pressure sensors
dc.typePHD thesis
dc.contributor.imecauthorGonzalez, Pilar
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Meyer, Kristin
imec.availabilityPublished - open access


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