dc.contributor.author | Gonzalez, Pilar | |
dc.contributor.author | Guo, Bin | |
dc.contributor.author | Rakowski, Michal | |
dc.contributor.author | De Meyer, Kristin | |
dc.contributor.author | Witvrouw, Ann | |
dc.date.accessioned | 2021-10-20T11:15:57Z | |
dc.date.available | 2021-10-20T11:15:57Z | |
dc.date.issued | 2012 | |
dc.identifier.issn | 0924-4247 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20737 | |
dc.source | IIOimport | |
dc.title | CMOS compatible polycrystalline silicon-germanium based pressure sensors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Gonzalez, Pilar | |
dc.contributor.imecauthor | Rakowski, Michal | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.source.peerreview | yes | |
dc.source.beginpage | 9 | |
dc.source.endpage | 18 | |
dc.source.journal | Sensors and Actuators A: Physical | |
dc.source.volume | 188 | |
dc.identifier.url | http://dx.doi.org/10.1016/j.sna.2011.12.018 | |
imec.availability | Published - imec | |