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Frequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern

dc.contributor.authorGronheid, Roel
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorYounkin, Todd
dc.contributor.authorPollentier, Ivan
dc.contributor.authorSomervell, Mark
dc.contributor.authorHooge, Joshua S.
dc.contributor.authorNafus, Kathleen
dc.contributor.authorNealey, Paul F.
dc.date.accessioned2021-10-20T11:21:26Z
dc.date.available2021-10-20T11:21:26Z
dc.date.issued2012
dc.identifier.issn1537-1646
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20757
dc.sourceIIOimport
dc.titleFrequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern
dc.typeJournal article
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.source.peerreviewyes
dc.source.beginpage31303
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue3
dc.source.volume11
imec.availabilityPublished - imec


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