Integrated optical pressure sensors in silicon-on-insulator
dc.contributor.author | Hallynck, Elewout | |
dc.contributor.author | Bienstman, Peter | |
dc.date.accessioned | 2021-10-20T11:26:06Z | |
dc.date.available | 2021-10-20T11:26:06Z | |
dc.date.issued | 2012-04 | |
dc.identifier.issn | 1943-0655 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20772 | |
dc.source | IIOimport | |
dc.title | Integrated optical pressure sensors in silicon-on-insulator | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bienstman, Peter | |
dc.contributor.orcidimec | Bienstman, Peter::0000-0001-6259-464X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 443 | |
dc.source.endpage | 450 | |
dc.source.journal | IEEE Photonics Journal | |
dc.source.issue | 2 | |
dc.source.volume | 4 | |
imec.availability | Published - open access |