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Integrated optical pressure sensors in silicon-on-insulator

dc.contributor.authorHallynck, Elewout
dc.contributor.authorBienstman, Peter
dc.date.accessioned2021-10-20T11:26:06Z
dc.date.available2021-10-20T11:26:06Z
dc.date.issued2012-04
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20772
dc.sourceIIOimport
dc.titleIntegrated optical pressure sensors in silicon-on-insulator
dc.typeJournal article
dc.contributor.imecauthorBienstman, Peter
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage443
dc.source.endpage450
dc.source.journalIEEE Photonics Journal
dc.source.issue2
dc.source.volume4
imec.availabilityPublished - open access


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