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S-shaped double-spring structures for high stiffness and spring height

dc.contributor.authorHantschel, Thomas
dc.contributor.authorChow, E.M.
dc.date.accessioned2021-10-20T11:26:51Z
dc.date.available2021-10-20T11:26:51Z
dc.date.issued2012
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20775
dc.sourceIIOimport
dc.titleS-shaped double-spring structures for high stiffness and spring height
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.beginpage231
dc.source.endpage234
dc.source.journalMicroelectronic Engineering
dc.source.volume2012
imec.availabilityPublished - imec


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